| 发明名称 |
SEMICONDUCTOR PROCESSING APPARATUS USING LASER |
| 摘要 |
Provided is a semiconductor processing apparatus, including a first laser beam irradiation unit having a first variable beam expanding telescope and a first galvanometer scanner transferring a first laser beam having a first wavelength, a second laser beam irradiation unit having a second variable beam expanding telescope and a second galvanometer scanner transferring a second laser beam having a second wavelength, and a telecentric lens. |
| 申请公布号 |
US2015017784(A1) |
申请公布日期 |
2015.01.15 |
| 申请号 |
US201414330055 |
申请日期 |
2014.07.14 |
| 申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
KIM Jong-guw |
| 分类号 |
H01L21/268;B23K26/40;B23K26/067;B23K26/08;B23K26/06 |
主分类号 |
H01L21/268 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A semiconductor processing apparatus, comprising:
a first laser beam irradiation unit including a first variable beam expanding telescope and a first galvanometer scanner transferring a first laser beam having a first wavelength; a second laser beam irradiation unit including a second variable beam expanding telescope and a second galvanometer scanner transferring a second laser beam having a second wavelength; and a telecentric lens. |
| 地址 |
Suwon-si KR |
