THIN-FILM PATTERN ARRAY AND PRODUCTION METHOD THEREFOR

摘要

Disclosed are: a thin-film pattern array able to minimise level differences between thin films; and a production method therefor. The thin-film pattern array comprises: a lower thin-film pattern which is positioned on a substrate; an upper thin-film pattern which is positioned on the upper edge of the lower thin-film pattern; and a level-difference attenuating pattern which is positioned between the lower thin-film pattern and the upper thin-film pattern, and has a gentle taper angle so as to be able to reduce the level difference between the lower thin-film pattern and the upper thin-film pattern.