发明名称 |
OPTICAL HOLLOW WAVEGUIDE ASSEMBLY |
摘要 |
The invention concerns an optical hollow waveguide assembly (1) comprising an optical hollow waveguide (2) for guiding illuminating light (3). The hollow waveguide (2) has a tubular base member (6) with a continuous waveguide cavity (7). The cavity has an illuminating light inlet (8) and an illuminating light outlet (9). A cavity inner wall (10) of the waveguide cavity (7) is designed to be highly reflective for the illuminating light (3) under grazing incidence. A gas source (12) is fluidically connected (13) to the waveguide cavity (7). As a result, a hollow waveguide assembly is produced in which the risk of contamination of the hollow waveguide is low.. |
申请公布号 |
WO2015003903(A1) |
申请公布日期 |
2015.01.15 |
申请号 |
WO2014EP63369 |
申请日期 |
2014.06.25 |
申请人 |
CARL ZEISS SMT GMBH |
发明人 |
SCHMIDT, STEFAN, WOLFGANG;DEGÜNTHER, MARKUS;DAVYDENKO, VLADIMIR |
分类号 |
F21V8/00 |
主分类号 |
F21V8/00 |
代理机构 |
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代理人 |
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地址 |
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