发明名称 OPTICAL HOLLOW WAVEGUIDE ASSEMBLY
摘要 The invention concerns an optical hollow waveguide assembly (1) comprising an optical hollow waveguide (2) for guiding illuminating light (3). The hollow waveguide (2) has a tubular base member (6) with a continuous waveguide cavity (7). The cavity has an illuminating light inlet (8) and an illuminating light outlet (9). A cavity inner wall (10) of the waveguide cavity (7) is designed to be highly reflective for the illuminating light (3) under grazing incidence. A gas source (12) is fluidically connected (13) to the waveguide cavity (7). As a result, a hollow waveguide assembly is produced in which the risk of contamination of the hollow waveguide is low..
申请公布号 WO2015003903(A1) 申请公布日期 2015.01.15
申请号 WO2014EP63369 申请日期 2014.06.25
申请人 CARL ZEISS SMT GMBH 发明人 SCHMIDT, STEFAN, WOLFGANG;DEGÜNTHER, MARKUS;DAVYDENKO, VLADIMIR
分类号 F21V8/00 主分类号 F21V8/00
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