RADIATION IMAGE SENSOR AND MANUFACTURING METHOD THEREOF
摘要
<p>The present invention relates to a radiation image sensor and a manufacturing method thereof which simplifies manufacturing of the radiation image sensor and reducing manufacturing costs by spraying liquid metal compound for electrode onto a compound semiconductor substrate to form a conductive layer through a metal substitution method.</p>
申请公布号
KR101487710(B1)
申请公布日期
2015.01.29
申请号
KR20130086515
申请日期
2013.07.23
申请人
KOREA ATOMIC ENERGY RESEARCH INSTITUTE
发明人
HA, JANG HO;KIM, HAN SOO;KIM, YOUNG SOO;JEONG, MAN HEE;YEO, SUN MOG
