| 摘要 |
A lid-opening/closing device comprises: a device body 2 on which a pod including a container body, a lid portion forming a bottom portion openable and closable with respect to the container body, and a locking mechanism performing unlocking and locking of the lid portion with respect to the container body is placed; a plurality of moving units 31 that perform unlocking operation to cause the locking mechanism to perform the unlocking and locking operation to cause the locking mechanism to perform the locking by moving engaging pins 35 configured to engage with the locking mechanism; a linkage unit 32 that causes the moving units 31 to perform the unlocking operation by moving the moving units 31 in conjunction with each other when causing the locking mechanism to perform the unlocking, and causes the moving units 31 to perform the locking operation by moving the moving units 31 in conjunction with each other when causing the locking mechanism to perform the locking; and an air cylinder 33 that simultaneously drives the moving units 31 and the linkage unit 32. |
