Cooling Laser Gas

摘要

A cooling arrangement for cooling laser gas for a gas laser includes a first cooling circuit having a first cooling assembly and a first heat exchanger for cooling laser gas which flows from a fan to a resonator of the gas laser, and a second cooling circuit which is independent of the first and which has a second cooling assembly and a second heat exchanger for cooling laser gas which flows from the resonator to the fan. The second cooling circuit has at least one additional heat exchanger for additionally cooling the laser gas which flows from the fan to the resonator.

主权项

1. A laser gas cooling system comprising:
a first cooling circuit circulating a first coolant flow through a first cooling assembly and a first heat exchanger at which heat is extracted from laser gas flowing from a fan to a gas laser resonator; and a second cooling circuit circulating a second coolant flow, independent of the first coolant flow, through a second cooling assembly and a second heat exchanger at which heat is extracted from laser gas flowing from the resonator to the fan; wherein the second cooling circuit has at least one additional heat exchanger configured to additionally cool the laser gas flowing from the fan to the resonator.