METHOD FOR MANUFACTURING A TOOL PART FOR AN INJECTION MOLDING PROCESS, A HOT EMBOSSING PROCESS, A NANO-IMPRINT PROCESS, OR AN EXTRUSION PROCESS

摘要

The present invention relates to a method for manufacturing a tool part for an injection molding process, a hot embossing process, nano-imprint process or an extrusion process. First, there is provided a master structure (10) with a surface area comprising nanometre-sized protrusions (11) with a minimum density of approximately 105 protrusions/mm2, the protrusions being positioned in a non-periodic, irregular pattern, said protrusions being created by a process comprising alternating passivation and etching into the master structure. Secondly, there is made a transfer of the master structure into a metal insert (20), the metal insert having a corresponding nanometre-sized pattern (21) from said protrusions, and thirdly, adapting the metal insert into a tool part (30) for enabling nanometre-sized patterns being formed by the tool part. The invention provides an easier and faster way of manufacturing the master structure, e.g. a black silicon wafer. It is a further advantage of the present invention that it provides an advant ageous way of making tools capable of producing self-cleaning surfaces without the need for chemical coating.

主权项

1. A method for manufacturing a tool part for an injection molding process, a hot embossing process, a nano-imprint process or an extrusion process, the method comprises:
providing a semiconductor master structure with a surface area comprising nanometre-sized protrusions with a minimum density of approximately 105 protrusions/mm2, the protrusions being positioned in a non-periodic, irregular pattern, said protrusions being created by a process comprising:
alternating passivation and etching into the master structure, and/orsimultaneous passivation and etching into the master structure, and/oretching into the master structure, transferring the master structure into a metal insert, the metal insert having a corresponding nanometre-sized pattern from said protrusions, and adapting the metal insert into a tool part for enabling nanometre-sized patterns being formed by the tool part.