发明名称 |
RESIN COMPOSITION, METHOD FOR FORMING PATTERN USING SAME, AND ELECTRONIC COMPONENT |
摘要 |
A resin composition which comprises (a) a polyimide precursor, (b) at least one alkoxysilane compound, (c) a photoinitiator, and (d) a solvent, wherein the component (a) has a structural unit represented by formula (1), the component (b) comprises one or more compounds from among compounds represented by formula (4-1) and compounds represented by formula (4-2), and the component (c) comprises an oxime ester compound. |
申请公布号 |
WO2015011893(A1) |
申请公布日期 |
2015.01.29 |
申请号 |
WO2014JP03713 |
申请日期 |
2014.07.14 |
申请人 |
HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD. |
发明人 |
ONO, KEISHI;ENOMOTO, TETSUYA;OHE, MASAYUKI;SUZUKI, KEIKO;SOEJIMA, KAZUYA;SUZUKI, ETSUHARU |
分类号 |
G03F7/027;C08K3/34;C08L79/08;G03F7/031;G03F7/075;H01L21/027 |
主分类号 |
G03F7/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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