发明名称 RESIN COMPOSITION, METHOD FOR FORMING PATTERN USING SAME, AND ELECTRONIC COMPONENT
摘要 A resin composition which comprises (a) a polyimide precursor, (b) at least one alkoxysilane compound, (c) a photoinitiator, and (d) a solvent, wherein the component (a) has a structural unit represented by formula (1), the component (b) comprises one or more compounds from among compounds represented by formula (4-1) and compounds represented by formula (4-2), and the component (c) comprises an oxime ester compound.
申请公布号 WO2015011893(A1) 申请公布日期 2015.01.29
申请号 WO2014JP03713 申请日期 2014.07.14
申请人 HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD. 发明人 ONO, KEISHI;ENOMOTO, TETSUYA;OHE, MASAYUKI;SUZUKI, KEIKO;SOEJIMA, KAZUYA;SUZUKI, ETSUHARU
分类号 G03F7/027;C08K3/34;C08L79/08;G03F7/031;G03F7/075;H01L21/027 主分类号 G03F7/027
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