| 摘要 |
<p>The present invention relates to an in-line test handler comprising: a sorting unit to perform a loading process of loading a semiconductor device to be tested in a test tray and an unloading process of unloading the tested semiconductor device from the test tray; multiple chamber units which are installed to be spaced apart from the storing unit; and a conveyor unit to convey the test tray so that the chamber units can be connected to each other in-line, wherein the conveyor unit includes multiple conveyors to convey the test tray along multiple conveying routes that are vertically spaced apart from each other. According to the present invention, the in-line test handler is realized to efficiently distribute the test tray considering the time to respectively perform the loading process, the unloading process and a test process, thereby improving an equipment operation rate and reducing the time to convey the test tray.</p> |
