| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly durable preionization discharge device.SOLUTION: A preionization discharge device for use in the laser chamber of a laser device using preionization includes a dielectric pipe, a preionization inner electrode installed on the inside of the dielectric pipe, and a preionization outer electrode installed on the outside of the dielectric pipe. The preionization outer electrode includes a contact plate coming into contact with the dielectric pipe, and an elastic part for applying a force in the direction of pushing the dielectric pipe. |
