LASER SCANNING TYPE OBSERVATION APPARATUS

摘要

A laser scanning type observation apparatus includes a pulsed-laser oscillation means irradiating pulsed laser to an object, a detector receiving light from the object to output a detection signal, a means detecting pulsed-laser oscillation to output a synchronous signal, a circuit delaying the synchronous signal for an optional amount of time to output a trigger signal, a means sampling the detection signal in synchronization with the trigger signal, a memory storing the sampled detection signal, a setting unit capable of setting delay time for delaying the synchronous signal in two or more stages within one period of the synchronous signal, and a decision unit determining an optimum delay stage for image formation using data on intensities of the detection signal at the respective delay stages, wherein the setting means fixes delay time for delaying the synchronous signal at delay time corresponding to the delay stage determined by the decision unit.

主权项

1. A laser scanning type observation apparatus comprising
a pulsed-laser oscillation means generating pulsed-laser oscillation to irradiate a pulsed laser beam to a test object, a light detecting unit receiving light from the test object to output a detection signal, a synchronous signal generating means detecting oscillation of pulsed laser from the pulsed-laser oscillation means to output a synchronous signal that is made to synchronize with the oscillation of the pulsed laser beam, a delay circuit unit delaying the synchronous signal outputted by the synchronous signal generating means for an optional amount of time, to output a trigger signal, a sampling means sampling the detection signal outputted by the light detecting unit while the sampling of the detection signal by the sampling means is being made to synchronize with the trigger signal outputted by the delay circuit unit, and a memory unit storing the detection signal sampled by the sampling means, the laser scanning type observation apparatus further comprising a multi-stage delay setting unit capable of setting delay time for delaying the synchronous signal by the delay circuit unit in at least two or more stages within one period of the synchronous signal, and a decision unit determining an optimum delay stage for image formation using data on intensities of the detection signal at the respective delay stages, the detection signal at the respective delay stages being sampled by the sampling means while the sampling of the detection signal at the respective delay stages by the sampling means is being made to synchronize with a trigger signal outputted by the delay circuit unit in accordance with the two or more stages of delay time set by the multi-stage delay setting unit and then the data on the intensities of the detection signal at the respective delay stages being stored in the memory unit, the multi-stage delay setting unit setting delay time for which the synchronous signal is delayed by the delay circuit unit, to delay time corresponding to the optimum delay stage for image formation which is determined by the decision unit, and the multi-stage delay setting unit fixing delay time for which the synchronous signal is delayed by the delay circuit unit, at delay time corresponding to the optimum delay stage for image formation, so as to be capable of performing observation.