| 摘要 |
<p>A cleaning performance prediction method determines a first distance from the origin of an X-Y plane to a first cleaning point on the X-Y plane, and the X-Y coordinates being determined for cleaning of the substrate to be carried out under first cleaning conditions. The method also determines a second distance from the origin of the X-Y plane to a second cleaning point on the X-Y plane, the X-Y coordinates of the second cleaning point being determined in the same manner as those of the first cleaning point but for cleaning of the substrate to be carried out under second cleaning conditions different from the first cleaning conditions.</p> |
