发明名称 |
PROBE STATION WITH IMPROVED INTERCONNECTION |
摘要 |
<p>An adapter conductively interconnects a chuck of a probe station and an instrument. The adapter includes a signal conductor conductively connected to the chuck and selectively connectable to a respective one of a ground potential, a bayonet connector output and a signal connection for the instrument. A guard potential conductor conductively connected to the chuck and selectively connectable to a one of a ground potential and a guard connection for the instrument; and a shield conductor connected to a ground potential.</p> |
申请公布号 |
EP2539724(B1) |
申请公布日期 |
2015.01.28 |
申请号 |
EP20110745352 |
申请日期 |
2011.02.18 |
申请人 |
CASCADE MICROTECH, INC. |
发明人 |
NEGISHI, KAZUKI;SIMMONS, MICHAEL;STORM, CHRISTOPHER;SWE, TOENAING |
分类号 |
H01R13/6597;G01R31/28;H01R24/56 |
主分类号 |
H01R13/6597 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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