发明名称 PROBE STATION WITH IMPROVED INTERCONNECTION
摘要 <p>An adapter conductively interconnects a chuck of a probe station and an instrument. The adapter includes a signal conductor conductively connected to the chuck and selectively connectable to a respective one of a ground potential, a bayonet connector output and a signal connection for the instrument. A guard potential conductor conductively connected to the chuck and selectively connectable to a one of a ground potential and a guard connection for the instrument; and a shield conductor connected to a ground potential.</p>
申请公布号 EP2539724(B1) 申请公布日期 2015.01.28
申请号 EP20110745352 申请日期 2011.02.18
申请人 CASCADE MICROTECH, INC. 发明人 NEGISHI, KAZUKI;SIMMONS, MICHAEL;STORM, CHRISTOPHER;SWE, TOENAING
分类号 H01R13/6597;G01R31/28;H01R24/56 主分类号 H01R13/6597
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