| 摘要 |
<p>The method for producing a laminate includes: a film forming step for forming a thin film (120, 160) having one or more layers on a support (110) to obtain a thin film; a defect cover layer (130, 170) forming step for forming a defect cover layer (130, 170) on the thin film (120, 160) by CVD; and an inspection step for detecting a defect (180) whose size is 0.1 µm or more and 20 µm or less through the top of the defect cover layer (130, 170). This method enables to produce a laminate with fewer defects, which effective allows for the detection of fine defects.</p> |
