| 摘要 |
Disclosed are: a physical quantity sensor which can detect multiple physical quantities simultaneously; and a process for producing the physical quantity sensor. Specifically disclosed is a physical quantity sensor (100), which has flexibility or bendability over the entire body thereof, and which comprises a substrate (1), an electrode layer (2) formed on the substrate (1), a piezoelectric element (3a) and a piezoelectric element (3b) both arranged in parallel to each other on the electrode layer (2), electrode layers (4a, 4b) respectively formed on the piezoelectric elements (3a, 3b), and protective layers (5a, 5b, 5c, 5d, 5e) respectively protecting the electrode layer (2), the piezoelectric elements (3a, 3b) and the electrode layers (4a, 4b). The substrate (1), the electrode layer (2), the piezoelectric element (3a) (a first piezoelectric element), the electrode layer (4a) (a third electrode layer) and the protective layers (5a, 5b, 5c, 5d, 5e) constitute a first physical quantity detection unit (6), and the substrate (1), the electrode layer (2), the piezoelectric element (3b) (a second piezoelectric element) and the electrode layer (4b) (a fourth electrode layer) constitute a second physical quantity detection unit (7). |
