发明名称 |
PIEZOELECTRIC ACTUATOR AND METHOD OF MAKING A PIEZOELECTRIC ACTUATOR |
摘要 |
In one example, a piezoelectric actuator includes a piezoelectric material, a first conductor on a first part of the piezoelectric material, and a membrane bonded to the first conductor with an adhesive. The first conductor has a root mean square surface roughness of at least 10 nm at the bonding interface with the membrane. |
申请公布号 |
EP2828082(A1) |
申请公布日期 |
2015.01.28 |
申请号 |
EP20120881959 |
申请日期 |
2012.07.25 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
ABBOTT, JAMES, ELMER, JR.;CHEN, CHIEN-HUA;POLLARD, JEFFREY, R. |
分类号 |
B41J2/045;B41J2/14;B41J2/145;B41J2/16;B41J2/175;H01L41/09;H01L41/313 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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