METHOD FOR MANUFACTURING LAMINATE INCLUDING XIII GROUP NITRIDE LAYER, METHOD FOR MANUFACTURING XIII GROUP NITRIDE SELF-SUPPORTED SUBSTRATE, METHOD FOR MANUFACTURING MOTHER SUBSTRATE FOR LIGHT-EMITTING DEVICE, AND XIII GROUP NITRIDE TEMPLATE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a laminate including a XIII Group nitride layer which can realize a higher yield in comparison to that achieved by a conventional method.SOLUTION: A method for manufacturing a laminate including a XIII Group nitride crystal layer comprises: a template substrate preparation step for preparing a template substrate having a seed substrate, and a XIII Group nitride layer stacked on the seed substrate; a stacking step for stacking at least one or more XIII Group nitride crystal layers on the template substrate into a multilayer structure; and a separation step for separating the seed substrate from the multilayer structure obtained by the stacking step by a laser lift-off method. The template substrate preparation step includes: a first preparation step for forming, on the seed substrate, a lower nitride layer made of a first XIII Group nitride; a second preparation step for forming, on the lower nitride layer, a droplet-containing layer including a second XIII Group nitride and In droplets distributed in the second XIII Group nitride; and a third preparation step for forming, on the droplet-containing layer, an upper nitride layer made of a third XIII Group nitride.