发明名称 ENVIRONMENT MEASURING APPARATUS AND ENVIRONMENT SENSOR
摘要 PROBLEM TO BE SOLVED: To provide an environment measuring apparatus and an environment sensor capable of reducing power consumption.SOLUTION: An environment measuring apparatus 100 includes: a temperature sensor for detecting the temperature of a gas in an environment; a first substrate 30 which has a cavity 35 formed on its upper surface; a thin film 31 that is provided on the upper surface of the first substrate 30 and contains heater elements 32 capable of heating the gas; and a temperature control circuit for controlling temperature of the heater elements 32 so that difference from the temperature of the gas becomes a predetermined value. The heater elements 32 are disposed at the upper part of the cavity 35 in the thin film 31.
申请公布号 JP2015021946(A) 申请公布日期 2015.02.02
申请号 JP20130152883 申请日期 2013.07.23
申请人 AZBIL CORP 发明人 CHIN TOEN;SOEDA SUSUMU;KAMAKURA NOBUHITO
分类号 G01P5/12 主分类号 G01P5/12
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