| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problem that productivity is reduced when the current density is reduced in Au plating with which the problems of generation of plating burning, reduction in corrosion resistance and the like can be avoided though there are methods for suppressing plating oozing in spot plating, which comprises enlarging the thickness of a mask part or lowering the flow speed of a plating solution. <P>SOLUTION: A partial plating method is provided in which an opening part of a partial plating apparatus is configured to have such a shape that the length of curved parts is at least 40% of the total length of the circumferential part including the curved parts of the opening part, and further, the shape of the opening part is brought close to a circular shape or elliptical shape from a square or rectangular shape. Thereby, the productivity is maintained without increasing the thickness of the mask material, the failure of plating burning is avoided, and plating oozing is also reduced. A partial plating apparatus is also provided. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
