| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to suppress vibration of a position of a drive target without using a servomotor when the position of the drive target vibrates in a case of positioning the drive target by air cylinder devices.SOLUTION: Each of a plurality of extensible air cylinder devices 5 includes one end portion fixed to a reference position Pr and the other end portion fixed to a drive target 3. An air controller 7 supplies air to the air cylinder devices 5 or discharges the air from the air cylinder devices 5, thereby extending/contracting the air cylinder devices 5 to cause the drive target 3 to make a reciprocating motion with respect to the reference position Pr. A vibration detector 9 detects vibration of the drive target 3 with respect to the reference position Pr. At a time of detecting the vibration, the air controller 7 controls supply of the air to these air cylinder devices 5 so as to contract some of the air cylinder devices 5 and, at the same time, to extend the other air cylinder devices 5.</p> |
