Insulated gate type transistor and display device

摘要

A transistor comprises an active layer of an oxide containing at least one element selected from In, Ga and Zn. The active layer is formed such that a desorption gas monitored as a water molecule by a temperature programmed desorption analysis is 1.4/nm3 or less.

主权项

1. A manufacturing method of a transistor that comprises an active layer of an oxide semiconductor containing In—Ga—Zn—O, the method comprising:
forming the active layer of the oxide semiconductor while controlling water vapor partial pressure in a deposition chamber so that the active layer contains a water molecule content of 1.4/nm3 or less.