PHASE SEPARATION STRUCTURE MANUFACTURING METHOD, PATTERN FORMING METHOD, AND FINE PATTERN FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a structure including a phase separation structure, a pattern forming method, and a fine pattern forming method.SOLUTION: A method for manufacturing a structure having a phase separation structure is characterized by comprising: a step of forming a layer containing a block copolymer of a purity of 98% or more having a plurality of kinds of blocks combined on a substrate; and a step of phase-separating the layer containing said block copolymer. Preferably, the method further comprises: a step of forming a layer having neutralized film by applying the neutralization film to the substrate; and a step of forming a guide pattern.