发明名称 SHEET STICKING DEVICE AND STICKING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a sheet sticking device and a sheet sticking method capable of preventing poor recovery of an unnecessary sheet.SOLUTION: A sheet sticking device 1 includes supply means 3 for supplying an adhesive sheet AS to a position facing the stuck surface WF1 of a stuck body WF, press means 4 for sticking the adhesive sheet AS to the stuck surface WF1 by pressing, and cutting means 5 for cutting out the adhesive sheet AS into a predetermined shape. The supply means 3 includes recovery means 38 for recovering an unnecessary sheet US, produced by forming a cut-out hole in the adhesive sheet AS, and guide means 39 for guiding the unnecessary sheet US to the recovery means 38 while maintaining the surface state thereof.</p>
申请公布号 JP2015056613(A) 申请公布日期 2015.03.23
申请号 JP20130190770 申请日期 2013.09.13
申请人 LINTEC CORP 发明人 SUGISHITA YOSHIAKI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
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