| 摘要 |
<p>The present invention relates to a system for charging a refrigerant of a temperature control system for semiconductor manufacturing process facilities using gas as a medium and a method for charging a refrigerant using the same. More specifically, the present invention comprises: process equipment wherein refrigerant gas is circulated; a compressor to increase pressure of the refrigerant gas flowing out from the process equipment through a first transferring line having a first electromagnetic control valve and a first pressure sensor; a condenser condensing the refrigerant gas flowing out from the compressor through a second transferring line having a second electromagnetic control valve and a second pressure sensor; and a body unit having a liquid receiver wherein the refrigerant gas which flows from the condenser through a third transferring line is temporarily stored.</p> |
