发明名称 METHOD FOR MANUFACTURING WIRE GRID POLARIZER, AND SUBSTRATE FOR WIRE GRID POLARIZER
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for manufacturing a wire grid polarizer, by which use efficiency of a metal material can be increased, and a substrate for a wire grid polarizer.SOLUTION: The method for manufacturing a wire grid polarizer includes the following processes. A stepped part 10 is formed on a surface of a substrate Sb, where the stepped part 10 includes a bottom face 11, a top face 12, and a side face 13 connecting the bottom face and the top face 12; a level difference U of the stepped part 10 is a difference in a height between the bottom face 11 and the top face 12; and the bottom face 11 and the top face 12 extend along one direction. Liquid repellency, which is a property of repelling a liquid material containing metal particles, is controlled in such a manner that the liquid repellency of the bottom face excluding a corner part formed by the bottom face 11 and the side face 13, and the liquid repellency of the top face 12 are set to be higher than the liquid repellency of the corner part and the liquid repellency of the side face. A liquid material applied to the stepped part 10 is aggregated on the side face 13 and on the corner part, and the aggregated liquid material is dried to form a wire.</p>
申请公布号 JP2015079100(A) 申请公布日期 2015.04.23
申请号 JP20130215682 申请日期 2013.10.16
申请人 ULVAC JAPAN LTD 发明人 SAKIO SUSUMU;OSAWA MASATO;SAITO KAZUYA
分类号 G02B5/30 主分类号 G02B5/30
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