MEASURING METHOD AND MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To estimate a degree of attaching of an attachment on the surface of a sample by measuring Raman scattered light and radiated fluorescence by radiating coherent light onto a sample using a simplified method and configuration in principle.SOLUTION: Coherent light from a laser light source 140 is radiated onto a sample 10 and an attachment 12 on a surface and Raman scattered light and fluorescence collected by a probe 101 are guided to a spectroscopic unit 110. Light in the wavelength region of Raman scattered light is reflected by a mirror 113 and detected by a first light detection unit 121. Light other than in the wavelength region of Raman scattered light penetrates the mirror 113 and is detected by a second light detection unit 122. A controller 130 quantitatively and reproducibly estimates an integrated value over a wide range of spectrum of fluorescence intensity dependent on the degree of attaching of the attachment calculated by the controller 130 based on the two detection values with an intensity pass band width product of Raman scattered light independent of the degree of attaching of the attachment being a scale.