| 摘要 |
<p>PROBLEM TO BE SOLVED: To include a function for discriminating an inspection face where a foreign substance is affixed, by setting a plurality of illumination areas on the inspection face for detection light or changing the illumination area when inspecting the foreign substance on a plurality of light-transmissive specimens.SOLUTION: A foreign substance inspection device is configured to inspect a foreign substance affixed on a plurality of light-transmissive specimens. The foreign substance inspection device includes: an illumination part for irradiating the specimens with the inspection light; and a photo-detection part including a detector for detecting scatter light generated from the foreign substance on the specimen irradiated with the inspection light. The illumination part is capable of changing an illumination condition of the inspection light to the specimen. From a difference of foreign substance detection results between the foreign substance inspection devices in the case where the specimens are illuminated under a plurality of different illumination conditions, it can be determined which inspection face the foreign substance is affixed on, among the plurality of inspection faces.</p> |
