| 摘要 |
PROBLEM TO BE SOLVED: To provide exposure equipment having means of preventing stage flowing at a handover position.SOLUTION: The exposure equipment includes: a motor composed of a magnet and a coil; a controller capable of individually controlling a current of the coil; and a function of a stage with a movable part for handing over a plate with another device. Mechanical electric equilibrium position is set at a handover position. |
