MANUFACTURING METHOD FOR LTG-BASED SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method that reduces variance in composition of a raised LTG-based single crystal.SOLUTION: There is provided a manufacturing method of manufacturing an LTG-based single crystal by an EFG method using a single crystal manufacturing device (1) including a metal mold (30) which holds a raw material melt at an upper surface part (30a) and a moving mechanism (40) which moves a seed crystal (50). The method includes the steps of: setting a moving speed corresponding to the composition of a desired single crystal by using correspondence relation between a moving speed at which the seed crystal is moved by the moving mechanism and the ratio of a concentration of a constituent element taken in the single crystal to a concentration of a constituent element of the LTG-based single crystal of the raw material melt before the manufacture; and moving the seed crystal by the moving mechanism at the set moving speed while bringing the seed crystal into contact with the raw material melt held at the upper surface part.