MAINTENANCE CARRIAGE FOR WAFER INSPECTION APPARATUS AND MAINTENANCE METHOD FOR WAFER INSPECTION APPARATUS

摘要

Provided is a maintenance carriage of a wafer inspecting apparatus capable of easily unloading a test head. The wafer inspecting apparatus (10) includes a cell tower (12) on which a plurality of cells (11) are arranged at four levels. Each cell (11) receives the test head (15). A maintenance carriage (27) is arranged on the outer side of the cell tower (12). The maintenance carriage (27) includes a carrier base (29) which has a plurality of rolling parts (28) and moves, a test head case (31) which receives the test head (15), a lift device (30) which is erectly installed from the carriage base (29) and moves the test head case (31) up and down, and a horizontal position adjusting stage (35) which is interposed between a lifter (34) of the lift device (30) and the test head case (31) and horizontally moves the test head case (31) with regard to the lifter (34).