METHOD FOR PRODUCING TRANSPARENT GAS BARRIER FILM AND APPARATUS FOR PRODUCING TRANSPARENT GAS BARRIER FILM

摘要

A method for producing a transparent gas barrier film is performed using a roll-to-roll method. The method includes laminating a plurality of thin films of two or more types having different components on a long belt-shaped resin substrate 8 while feeding the resin substrate 8, wherein a plurality of evaporation sources 91 and 92 are disposed in the thin film formation area, the number of evaporation sources being the same as the number of types of the thin films, and the long belt-shaped resin substrate 8 is passed through the thin film formation area and a non-formation area alternately, and materials included in the plurality of evaporation sources 91 and 92 are each deposited on the resin substrate 8 in the thin film formation area to form on the resin substrate 8 a transparent gas barrier layer having the plurality of laminated thin films of two or more types.

主权项

1. A method for producing a transparent gas barrier film using a roll-to-roll method, comprising:
laminating a plurality of thin films of two or more types having different components on a resin substrate having a long belt-shape in the course of feeding the resin substrate, wherein a plurality of evaporation sources are disposed in a thin film formation area in which the number of the evaporation sources is the same as the number of types of the thin films, and the long belt shaped resin substrate is passed through the thin film formation area and a non-formation area alternately while feeding the resin substrate so as to draw a helical conveyance track, and materials contained in the plurality of evaporation sources are each deposited on the resin substrate in the thin film formation area to form on the resin substrate a transparent gas barrier layer having the laminated thin films.