CATADIOPTRIC IMAGING SYSTEMS FOR DIGITAL SCANNER

摘要

Projection optical system for forming an image on a substrate and including an illumination relay lens and a projection lens each of which is a catadioptric system. The projection lens may include two portions in optical communication with one another, the first of which is dioptric and the second of which is catadioptric. In a specific case, the projection optical system satisfies;4<βIβT<30,;where βI and βT are magnifications of the first portion and the overall projection lens. Optionally, the projection lens may be structured to additionally satisfy;6<βIIβT<20,;where βII is a magnification of the second portion. A digital scanner including such projection optical system and operating with UV light having a spectral bandwidth on the order of 1 picometer. Method for forming an image with such projection optical system.

主权项

1. A projection optical system configured to form an image on an image plane, comprising:
a catadioptric projection lens including first and second portions in optical communication with one another; said second portion configured as a catadioptric optical system designed to form an intermediate optical image at a location between elements of the second portion; said first portion configured as a dioptric optical system disposed to transfer light from said location to the image plane of the projection optical system to form the image thereon, said catadioptric projection lens configured to satisfy a condition of4<βIβT<30,wherein βI denotes a magnification of the first portion and βT denotes a magnification of the catadioptric projection lens.