| 发明名称 |
TRANSDUCER AND METHOD FOR FORMING THE SAME |
| 摘要 |
A transducer is provided, which includes a substrate, wherein a cavity is defined at least partially through the substrate, at least one stopper structure arranged within the cavity, a support layer arranged over the at least one stopper structure and the cavity to seal the cavity, and a piezoelectric functional arrangement arranged on the support layer. According to further embodiments of the present invention, a method for forming a transducer is also provided. |
| 申请公布号 |
US2015145374(A1) |
申请公布日期 |
2015.05.28 |
| 申请号 |
US201414553023 |
申请日期 |
2014.11.25 |
| 申请人 |
Agency for Science, Technology and Research |
发明人 |
XU Jinghui;YU Hongbin;LOU Liang;GU Alex Yuandong |
| 分类号 |
B06B1/06;H01L41/31;B06B1/02 |
主分类号 |
B06B1/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A transducer comprising:
a substrate, wherein a cavity is defined at least partially through the substrate; at least one stopper structure arranged within the cavity; a support layer arranged over the at least one stopper structure and the cavity to seal the cavity; and a piezoelectric functional arrangement arranged on the support layer. |
| 地址 |
Singapore SG |
