发明名称 |
Manufacturing methods of semiconductor substrate, package and device |
摘要 |
A manufacturing method of semiconductor substrate includes following steps: providing a base layer; forming a plurality of traces on the base layer; forming a plurality of studs correspondingly on the traces; forming a molding material layer on the base layer to encapsulate the traces and studs; forming a concave portion on the molding material layer; and, removing the base layer. |
申请公布号 |
US9059050(B2) |
申请公布日期 |
2015.06.16 |
申请号 |
US201414159474 |
申请日期 |
2014.01.21 |
申请人 |
ADVANPACK SOLUTIONS PTE. LTD. |
发明人 |
Lim Shoa-Siong;Lim Kian-Hock |
分类号 |
H01L21/302;H01L23/13;H01L23/498;H01L25/10;H01L21/48;H01L21/56;H01L23/24;H01L23/31 |
主分类号 |
H01L21/302 |
代理机构 |
McClure, Qualey & Rodack, LLP |
代理人 |
McClure, Qualey & Rodack, LLP |
主权项 |
1. A manufacturing method of semiconductor substrate, package or device, comprising:
providing a base layer; forming a first conductive layer on the base layer; forming a second conductive layer on the first conductive layer; forming a molding material layer on the base layer to encapsulate the first and second conductive layers; thinning the molding material layer to form a carrier having a first surface and a second surface opposite the first surface, wherein the first and second conductive layers are embedded in the carrier and electrically connecting the first surface to the second surface; forming a concave portion on the carrier; and removing the base layer. |
地址 |
Kallang SG |