METHODS, SYSTEMS, AND COMPUTER READABLE MEDIA FOR MEASURING AND CORRECTING DRIFT DISTORTION IN IMAGES OBTAINED USING A SCANNING MICROSCOPE

摘要

The subject matter described herein includes methods, systems, and computer readable media for measuring and correcting drift distortion in images obtained using the scanning microscope. One method includes obtaining an image series of a sample acquired using scanning- microscope by rotating scan coordinates of the microscope between successive image frames. The method further includes determining at least one measurement of an angle or a distance associated with an image feature as a function of rotation angle from the series of rotated images. The method further includes using the at least one measurement to determine a model for drift distortion in the series of images. The method further includes using the drift distortion model to generate a drift corrected image from the series of images.