| 发明名称 |
STAGE, STAGE MANUFACTURING METHOD, AND HEAT EXCHANGER |
| 摘要 |
A stage includes a plate and a heat exchanger. The plate has a front surface, on which a substrate is mounted, and a rear surface. The heat exchanger is configured to individually supply a heat exchange medium to a plurality of two-dimensionally distributed and mutually non-inclusive regions of the rear surface of the plate and to recover the heat exchange medium thus supplied. |
| 申请公布号 |
US2015179485(A1) |
申请公布日期 |
2015.06.25 |
| 申请号 |
US201414576871 |
申请日期 |
2014.12.19 |
| 申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
HIROKI Tsutomu |
| 分类号 |
H01L21/67;H01L21/683;B23P15/26 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A stage, comprising:
a plate having a front surface, on which a substrate is mounted, and a rear surface; and a heat exchanger configured to individually supply a heat exchange medium to a plurality of two-dimensionally distributed and mutually non-inclusive regions of the rear surface of the plate, and to recover the heat exchange medium thus supplied. |
| 地址 |
Tokyo JP |
