发明名称 THIN FILM TRANSISTOR
摘要 <p>The present invention provides a thin film transistor. The thin transistor includes a substrate; an active layer formed on the substrate; a gate insulating film formed on the active layer; a gate electrode formed on the gate insulating film; a doping area formed on the active layer on both sides of the gate electrode; and source and drain electrodes separated from each other on the substrate on both sides of the gate electrode, and making direct contact with the doping area. Therefore, the present invention is able to provide a self-arrangement type semiconductor thin film transistor structure without a contact process.</p>
申请公布号 KR20150081026(A) 申请公布日期 2015.07.13
申请号 KR20140000574 申请日期 2014.01.03
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 HWANG, CHI SUN;PARK, SANG HEE;CHO, SUNG HAENG;OH, HIM CHAN;YANG, JONG HEON;RYU, MIN KI;BYUN, CHUN WON;PI, JAE EUN;LEE, SU JAE;PARK, JONGH YURK;CHU, HYE YONG
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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