| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device for performing an imprint process in a short time and achieving high dimensional precision of a pattern transferred to a transfer target body.SOLUTION: A transfer device comprises: driving means 10 for moving an object to be driven which is a mold MP or a transfer target body WF from a first position where the mold leaves the transfer target body to a second position where the mold comes into contact with the transfer target body and applying pressing force between the mold and the transfer target body; detecting means 104 for detecting a value regarding the pressing force; and control means 501 for controlling the driving means. The control means controls the driving means so as to move the object to be driven from the first position to a third position, as a target position, between the first position and the second position, and also controls the driving means so that after the object to be driven moves to the third position, the value detected by the detecting means increases to a target value. |
