发明名称 DEVICE FOR REMOVING A COATING FROM A SUBSTRATE AND METHOD
摘要 <p>In a device (1) for removing a coating particularly a photoresist from a substrate (10) in at least one area of the substrate (10) a nozzle (11) is to be suitable for applying a jet of a solution medium.</p>
申请公布号 IN2081MUN2014(A) 申请公布日期 2015.08.21
申请号 IN2014MU02081 申请日期 2014.10.17
申请人 SOLAR SEMI GMBH 发明人 MUFFLER PIRMIN
分类号 H01L21/67 主分类号 H01L21/67
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