发明名称 SUBSTRATE WITH LED PATTERN, METHOD FOR MANUFACTURING THE SAME, AND METHOD FOR MANUFACTURING LED ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a substrate with an LED pattern and a method for manufacturing the same which can obtain an LED element more excellent in light extraction efficiency than conventional.SOLUTION: A method for manufacturing a substrate with an LED pattern includes: a step that a scribe line is formed by performing laser scribing along a planned division position defined on one main surface of a wafer; and a step that an LED pattern that repeats a unit pattern two-dimensionally each of which composes one LED element is formed on the laser-scribed side of the main surface. In the scribing step, the scribe line is formed as an arrangement of a plurality of processing marks discretely present along the planned division position inside the wafer, and a crack is extended between the scribe line and the main surface.
申请公布号 JP2015162565(A) 申请公布日期 2015.09.07
申请号 JP20140036675 申请日期 2014.02.27
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO LTD 发明人 NAKATANI FUMIYOSHI
分类号 H01L21/301;B23K26/00;B23K26/046;B23K26/073;B23K26/53;H01L33/02 主分类号 H01L21/301
代理机构 代理人
主权项
地址