发明名称 |
SUBSTRATE WITH LED PATTERN, METHOD FOR MANUFACTURING THE SAME, AND METHOD FOR MANUFACTURING LED ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To provide a substrate with an LED pattern and a method for manufacturing the same which can obtain an LED element more excellent in light extraction efficiency than conventional.SOLUTION: A method for manufacturing a substrate with an LED pattern includes: a step that a scribe line is formed by performing laser scribing along a planned division position defined on one main surface of a wafer; and a step that an LED pattern that repeats a unit pattern two-dimensionally each of which composes one LED element is formed on the laser-scribed side of the main surface. In the scribing step, the scribe line is formed as an arrangement of a plurality of processing marks discretely present along the planned division position inside the wafer, and a crack is extended between the scribe line and the main surface. |
申请公布号 |
JP2015162565(A) |
申请公布日期 |
2015.09.07 |
申请号 |
JP20140036675 |
申请日期 |
2014.02.27 |
申请人 |
MITSUBOSHI DIAMOND INDUSTRIAL CO LTD |
发明人 |
NAKATANI FUMIYOSHI |
分类号 |
H01L21/301;B23K26/00;B23K26/046;B23K26/073;B23K26/53;H01L33/02 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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