COATING FILM FORMING AND DRYING METHOD AND COATING FILM FORMING AND DRYING DEVICE

摘要

PROBLEM TO BE SOLVED: To effectively prevent a phenomenon that a coating film spreads to an outer circumference side on a substrate in a process of forming and drying the coating film on the substrate by using an inkjet coating device and a situation which causes a coffee ring phenomenon.SOLUTION: A coating film forming and drying method includes: a film liquid discharge process of discharging a film liquid 6 on a substrate 2 by using a coating device; and a coating film drying process of drying a fluent coating film 7 formed on the substrate 2 after the film liquid discharge process. An inkjet coating device 1 is used as the coating device in the film liquid discharge process. In the coating film drying process, the fluent coating film 7 formed on the substrate 2 after discharging the film liquid 6 by the inkjet coating device 1 is decompressed and dried in a temperature atmosphere of 10-40°C.