| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an ultrasonic device contributive to enhancement of accuracy of ultrasonic measurement.SOLUTION: An ultrasonic device 17 includes a substrate 44. On the substrate 44, an element array including a plurality of ultrasonic transducer elements 23, arranged in array, is formed. An acoustic matching layer 51 is formed of a base metal 57 and a filler 58, and covers the element array. In the plan view of the substrate 44 in the thickness direction, the ratio of occupied volume of the filler 58 per unit volume between adjoining ultrasonic transducer elements 23 is large, compared with the range of the ultrasonic transducer elements 23.</p> |
