| 摘要 |
<p>Disclosed are a labyrinth seal, a compliant device, a solution film forming facility, and a solution film forming method for suppressing step deviation malfunction and engagement of air when a thin film is quickly eliminated. A wind blocking block (27) is adjacent to a band (23) and arranged along a bead (31) to block accompany wind (58) to the bead (31) from an upper side of a driving direction of the band (23). A labyrinth seal (59) is formed on a band facing surface (27A) of the wind blocking block (27). The labyrinth seal (59) comprises first to third seal units (61-63). Seal units (65-67) comprises the first to third seal units (61-63), three teeth (65A-67A), and grooves (65B-67B). The depth (H1) and width (L31, L32, L33) are determined by a frequency band of pneumatic vibration of the accompany wind (58). Vibration of the bead (31) is suppressed by each groove (65B-67B) to eliminate a step deviation of a compliant film.</p> |
