Methods and apparatus for measuring analytes using large scale FET arrays

摘要

Methods and apparatus relating to very large scale FET arrays for analyte measurements. ChemFET (e.g., ISFET) arrays may be fabricated using conventional CMOS processing techniques based on improved FET pixel and array designs that increase measurement sensitivity and accuracy, and at the same time facilitate significantly small pixel sizes and dense arrays. Improved array control techniques provide for rapid data acquisition from large and dense arrays. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in a wide variety of chemical and/or biological processes. In one example, chemFET arrays facilitate DNA sequencing techniques based on monitoring changes in hydrogen ion concentration (pH), changes in other analyte concentration, and/or binding events associated with chemical processes relating to DNA synthesis.

主权项

1. An apparatus comprising:
a device structure including an array of sensors, a sensor of the array of sensors including an electrode pad disposed at a surface of the device structure and forming a portion of an ion sensitive field effect transistor; and a wall structure disposed over the surface of the device structure defining an array of wells substantially corresponding with the array of sensors, wherein the electrode pad of the sensor of the array of sensors underlies a surface of a well proximal to the device structure, the wall structure including at least one layer including a polymeric material.