| 发明名称 |
Method and Apparatus for Generating Radiation |
| 摘要 |
A method for generating radiation. Directing a first body from a first location. Directing a second body from a second, different location. The first body and second body being used to form a target at a plasma formation location. At least one of the first body and second body comprising a fuel for use in generating a radiation generating plasma. Directing initiating radiation at the target at the plasma formation location to generate a radiation generating plasma from the target. |
| 申请公布号 |
US2015264791(A1) |
申请公布日期 |
2015.09.17 |
| 申请号 |
US201314418366 |
申请日期 |
2013.07.05 |
| 申请人 |
ASML Netherlands B.V. |
发明人 |
Nikipelov Andrey;Dijksman Frederik;Yakunin Mikhailovich |
| 分类号 |
H05G2/00 |
主分类号 |
H05G2/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of generating radiation, the method comprising:
directing a first body from a first location; directing a second body from a second location that is different from the first location, the first body and the second body being used to form a target at a plasma formation location, wherein the first body or the second body comprises a fuel for use in generating a radiation generating plasma; and directing initiating radiation at the target at the plasma formation location to generate the radiation generating plasma from the target. |
| 地址 |
Veldhoven NL |
