| 摘要 |
The purpose of the present invention is to provide a vacuum pump with an abatement function which prevents contamination of a process chamber without allowing products generated by an exhaust gas treatment to flow back to the process chamber, and reduces an amount of gas to be treated without allowing purge gas and diluent gas to be contained in the exhaust gas; thereby achieving energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part. The abatement part to treat the exhaust gas is attached to the vacuum pump (1) with an abatement function. The vacuum pump (1) comprises a dry vacuum pump (1) having a pair of multistage pump rotors each of which comprising a plurality of rotors (R1, R2, R3, R4, R5, R6) arranged on a rotating shaft (S). At least one abatement part (3A, 3B, 3C) is connected to a space between the stages of the multistage pump rotors. |
