TUBULAR TARGET

摘要

A tubular target is formed of refractory metal or a refractory metal alloy. The target has at least one tubular portion X with a relative density RDx and at least one tubular portion Y with a relative density RDy. At least one tubular portion X has, at least in some regions, a larger outer diameter than a tubular portion Y at least in some regions. A density ratio satisfies the relation (RDy−RDx)/RDy≧0.001. There is also described a method for producing a tubular target from refractory metal or refractory metal alloy by sintering and local deformation of different degree. The tubular target has a more uniform sputter removal over the entire surface area compared with prior tubular targets. The tubular targets do not exhibit any tendency to arcing or to particle regeneration.