发明名称 |
IMPRINT MOLD MANUFACTURING METHOD, IMPRINT MOLD, AND IMPRINT MOLD MANUFACTURING KIT |
摘要 |
A method for manufacturing an imprint mold which can prevent accumulation of the transferring resin at the joining portion of the film mold is provided. According to the present invention, a method for manufacturing an imprint mold, including: a winding step to wind a resin film mold onto a cylindrical transferring roll, the resin film mold being provided with a reverse pattern of a desired fine concave-convex pattern and the resin film mold being wound onto the transferring roll so that a gap without the reverse pattern is provided at a butting portion of both ends of the resin film mold; a resin filling step to fill a resin composition into the gap; and a pattern forming step to form a pattern substantially the same as the reverse pattern onto the resin composition, is provided. |
申请公布号 |
EP2923817(A1) |
申请公布日期 |
2015.09.30 |
申请号 |
EP20130856214 |
申请日期 |
2013.11.18 |
申请人 |
SOKEN CHEMICAL & ENGINEERING CO., LTD. |
发明人 |
MISAWA, TAKEHIDE;SAKATA, IKUMI |
分类号 |
B29C59/04;B29C33/38;H01L21/027 |
主分类号 |
B29C59/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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