发明名称 PRESSURE SENSOR
摘要 An object of the present invention is to realize a pressure sensor with a small variation in sensor characteristics. The pressure sensor includes a diaphragm having longitudinal and lateral sides, and four strain gauges disposed on the diaphragm. The four strain gauges are arranged at a center of the diaphragm. Two of the four strain gauges are arranged along a lateral direction, and other two strain gauges are arranged along a longitudinal direction.
申请公布号 EP2924408(A1) 申请公布日期 2015.09.30
申请号 EP20130857220 申请日期 2013.11.06
申请人 HITACHI AUTOMOTIVE SYSTEMS, LTD. 发明人 KAZAMA ATSUSHI;OTA HIROYUKI;HASHIZUME JIRO;ONOZUKA JUNJI;ONUKI HIROSHI;TOBITA MIHO
分类号 G01L9/00;G01L9/06;H01L29/84 主分类号 G01L9/00
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