发明名称 |
PRESSURE SENSOR |
摘要 |
An object of the present invention is to realize a pressure sensor with a small variation in sensor characteristics. The pressure sensor includes a diaphragm having longitudinal and lateral sides, and four strain gauges disposed on the diaphragm. The four strain gauges are arranged at a center of the diaphragm. Two of the four strain gauges are arranged along a lateral direction, and other two strain gauges are arranged along a longitudinal direction. |
申请公布号 |
EP2924408(A1) |
申请公布日期 |
2015.09.30 |
申请号 |
EP20130857220 |
申请日期 |
2013.11.06 |
申请人 |
HITACHI AUTOMOTIVE SYSTEMS, LTD. |
发明人 |
KAZAMA ATSUSHI;OTA HIROYUKI;HASHIZUME JIRO;ONOZUKA JUNJI;ONUKI HIROSHI;TOBITA MIHO |
分类号 |
G01L9/00;G01L9/06;H01L29/84 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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