发明名称 |
GAS DISTRIBUTION SYSTEM, REACTOR INCLUDING THE SYSTEM, AND METHODS OF USING THE SAME |
摘要 |
A gas distribution system, a reactor system including the gas distribution system, and methods of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently fine tune gas source locations and gas flow rates of reactants to a reaction chamber of the reactor systems. |
申请公布号 |
KR20150108755(A) |
申请公布日期 |
2015.09.30 |
申请号 |
KR20150031720 |
申请日期 |
2015.03.06 |
申请人 |
ASM IP HOLDING B.V. |
发明人 |
HAWKINS MARK;HALLECK BRADLEY LEONARD;KIRSCHENHEITER TOM;HOSSA BENJAMIN;POTTEBAUM CLAY;MISKYS CLAUDIO |
分类号 |
B01J19/26;B01J19/08 |
主分类号 |
B01J19/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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